Structure of TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM CAS 175923-04-3

TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM CAS 175923-04-3

Identification

CAS Number

175923-04-3

Name

TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM

Synonyms

Ethanamine, N-methyl-, zirconium(4+) salt (4:1) [ACD/Index Name]

MFCD03427131 [MDL number]

Temaz [Trade name]

Tetrakis(ethylmethylamido)zirconium(IV)

Tetrakis(ethylmethylamino)zirconium(IV)

Tétrakis[éthyl(méthyl)azanide] de zirconium(4+) [French] [ACD/IUPAC Name]

Zirconium(4+) tetrakis[ethyl(methyl)azanide] [ACD/IUPAC Name]

Zirconium(4+)tetrakis[ethyl(methyl)azanid] [German] [ACD/IUPAC Name]

ETHYL(METHYL){TRIS[ETHYL(METHYL)AMINO]ZIRCONIO}AMINE

temaz: zr[n(ch3)(ch2ch3)]4

TETRAKIS ZIRCONIUM

Tetrakis(ethylmethylamino)zirconium

ZIRCONIUM TETRAKIS(ETHYLMETHYLAMIDE)

Zirconium(4+)tetrakis[ethyl(methyl)azanid]

SMILES

CCN(C)[Zr](N(C)CC)(N(C)CC)N(C)CC

StdInChI

InChI=1S/4C3H8N.Zr/c41-3-4-2;/h43H2,1-2H3;/q4*-1;+4

StdInChIKey

SRLSISLWUNZOOB-UHFFFAOYSA-N

Molecular Formula

C12H32N4Zr

Molecular Weight

323.633

MDL Number

MFCD03427131

Properties

Appearance

Colorless to yellow liquid

Structure

Structure of TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM CAS 175923-04-3

Structure of TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM CAS 175923-04-3

Safety Data

Symbol

exclamation-mark-jpgexclamation-mark-jpgGHS02, GHS07

Signal Word

Warning

Hazard statements

H225 – H261 – H315 – H319 – H335

Precautionary Statements

P210 – P223 – P231 + P232 – P233 – P303 + P361 + P353 – P305 + P351 + P338

WGK Germany

3

MSDS Download

Specifications and Other Information of Our

Identification Methods

MS

Purity

99.99% min

Chloride ion

≤10ppm

Shelf Life

1 year

Known Application

TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM CAS 175923-04-3 may be used as a metal-organic precursor for thin film deposition in semiconductor manufacturing. It serves as a source of zirconium for the preparation of thin film coatings, such as in the fabrication of integrated circuits and other electronic devices.

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